Title Database needs for modeling and simulation of plasma processing / Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

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Description	1 online resource (64 pages).
Physical Medium	polychrome
Description	text file
Series	The compass series
	Compass series (Washington, D.C.)
Bibliography	Includes bibliographical references.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Semiconductors -- Design and construction -- Congresses.
	Semiconductors -- Design and construction.
	Plasma engineering -- Databases -- Congresses.
	Plasma engineering.
	Databases.
	Plasma engineering -- Computer simulation -- Congresses.
	Plasma engineering -- Computer simulation.
Indexed Term	Andre fag (naturvidenskab og teknik) Andre fag.
Genre/Form	Electronic books.
	Conference papers and proceedings.
	Conference papers and proceedings.
Added Author	National Research Council (U.S.). Panel on Database Needs in Plasma Processing.
Other Form:	Print version: Database needs for modeling and simulation of plasma processing. Washington, D.C. : National Academy Press, 1996 0309055911 (DLC) 96070732 (OCoLC)36176538
ISBN	0585084548 (electronic book)
	9780585084541 (electronic book)
	0309055911 (paperback)
	9780309055918 (paperback)