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Microelectromechanical systems -- Automation -- Congresses. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh00007652 https://id.loc.gov/authorities/subjects/sh99001533 : International Applied Mechanics, Mechatronics Automation Symposium
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Microelectromechanical systems -- Design and construction. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh2002006372
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Microelectromechanical systems -- Industrial applications. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh00006117
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Microelectromechanical systems -- Materials. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh2002006405
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Microelectromechanical systems -- Simulation methods. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh99005303
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Microelectromechanical systems -- Technological innovations -- Congresses. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh2001009095 https://id.loc.gov/authorities/subjects/sh99001533 : International Conference on Mechatronic Systems and Automation Systems
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Microelectromechanical systems -- Testing. / https://id.loc.gov/authorities/subjects/sh97007351 https://id.loc.gov/authorities/subjects/sh99005648
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