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Authors (1-5 of 5)
Heyns, Marc.
1
Bestseller
Ultra clean processing of semiconductor surfaces X : selected, peer reviewed papers from the 10th In
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (10th : 2008 : Ostend, Belgium)
Durnten-Zurich, Switzerland : TTP, [2012]
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Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th i
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (11th : 2012 : Ghent, Belgium)
Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013]
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3
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Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)
Pfaffikon, Switzerland : TTP, 2014.
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4
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Ultra Clean Processing of Semiconductor Surfaces XIII.
Mertens, Paul W.
Zurich : Trans Tech Publications, 2016.
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5
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Ultra clean processing of semiconductor surfaces XIV : 14th International Symposium on Ultra Clean P
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th : 2018 : Leuven, Belgium), author.
Stafa-Zuerich, Switzerland : Trans Tech Publications Ltd, [2018]
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