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Conference International Symposium on Ultra Clean Processing of Semiconductor Surfaces (10th : 2008 : Ostend, Belgium)

Title Ultra clean processing of semiconductor surfaces X : selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.

Publication Info. Durnten-Zurich, Switzerland : TTP, [2012]
©2012

Item Status

Description 1 online resource (xiv, 371 pages) : illustrations.
Physical Medium polychrome
Description text file
Series Solid state phenomena, 1012-0394 ; v. 187
Diffusion and defect data. Pt. B, Solid state phenomena ; v. 187.
Bibliography Includes bibliographical references and indexes.
Summary The International Symposium on Ultra-Clean Processing of Semiconductor Surfaces (UCPSS) is a bi-annual conference which has been organized by IMEC since 1992. The scope of the symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacture. At first, silicon was typically the main semiconductor of interest. As other semiconducting materials such as SiGe, SiC, Ge and III-V compounds came under consideration for future devices, the scope was broadened so as to include these materials. Parallelling the fast-moving CMOS industry, the photovoltaic industry has also recognized the need to make improvements in cleaning. Moreover, in order to promote these semiconductor cleaning activities in PV, it was decided to add a special session focused on this topic.
Local Note eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject Semiconductors -- Surfaces -- Congresses.
Semiconductors -- Surfaces.
Genre/Form Electronic books.
Conference papers and proceedings.
Conference papers and proceedings.
Added Author Mertens, Paul.
Meuris, Marc.
Heyns, Marc.
Added Title UCPSS 2010
Other Form: Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (10th : 2008 : Ostend, Belgium). Ultra clean processing of semiconductor surfaces X. Durnten-Zurich, Switzerland ; TTP, ©2012 (OCoLC)795762112
ISBN 9783038137009 (electronic book)
3038137006 (electronic book)
9783037853887
3037853883