| Description |
1 online resource (331 pages) : illustrations. |
| Physical Medium |
polychrome |
| Description |
text file |
| Series |
Solid State Phenomena,
1662-7799 ;
Volume 219
|
|
Diffusion and defect data. Pt. B, Solid state phenomena ; v. 219.
|
| Bibliography |
Includes bibliographical references at the end of each chapters and index. |
| Summary |
Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications,Chapter 2: Cleaning for FEOL Applications: Beyond-Si Active Area, Chapter 3: Wet Etching for FEOL Applications,Chapter 4: Wet Processing of High Aspect Ratio Structures, Chapter 5: Fluid Dynamics, Cleaning Mechanics,Chapter 6: Photo Resist Performance and Rework, Chapter 7: Cleaning for BEOL Interconnect Applications, Chapter 8: Cleaning for 3D Applications, Chapter 9: Contamination Control and AMC,Chapter 10: Cleaning and Wet Etching for Semiconductor Photo-Voltaic Cells Keyword: Ultra-cleaning, precision cleaning, wet cleaning, Semiconductor Surfaces, contamination control, surface impurities, surface defects, Integrated circuits, Micro-electronic structures, photovoltaic processing, proceedings UCPSS. |
| Local Note |
eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America |
| Subject |
Semiconductors -- Congresses.
|
|
Semiconductors. |
| Genre/Form |
Electronic books.
|
|
Conference papers and proceedings.
|
|
Conference papers and proceedings.
|
| Added Author |
Mertens, Paul, editor.
|
|
Meuris, Marc, editor.
|
|
Heyns, Marc, editor.
|
| Other Form: |
Print version: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium). Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium. Pfaffikon, Switzerland : TTP, ©2014 333 pages Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219 9783038352426 |
| ISBN |
9783038266266 (electronic book) |
|
3038266264 (electronic book) |
|
9783038352426 |
|
