Description |
1 online resource (xi, 324 pages) : illustrations. |
Physical Medium |
polychrome |
Description |
text file |
Series |
Plasma--materials interactions
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Plasma--materials interactions.
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Bibliography |
Includes bibliographical references and index. |
Contents |
Front Cover; Plasma Deposition of Amorphous Silicon-Based Materials; Copyright Page; Contents; Contributors; Preface; Chapter 1. Chemistry of Amorphous Silicon Deposition Processes: Fundamentals and Controversial Aspects; Chapter 2. Diagnostics of Amorphous Silicon (a-Si) Plasma Processes; Chapter 3. Deposition Conditions and the Optoelectronic Properties of a-Si:H Alloys; Chapter 4. Reactor Design for a-Si:H Deposition; Chapter 5. Optoelectronic Properties of Amorphous Silicon Using the Plasma- Enhanced Chemical Vapor Deposition (PECVD) Technique; Chapter 6. Amorphous-Silicon-Based Devices. |
Summary |
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. |
Local Note |
eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America |
Subject |
Amorphous semiconductors -- Design and construction.
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Amorphous semiconductors -- Design and construction. |
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Amorphous semiconductors. |
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Silicon alloys.
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Silicon alloys. |
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Plasma-enhanced chemical vapor deposition.
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Plasma-enhanced chemical vapor deposition. |
Indexed Term |
Semiconductors |
Genre/Form |
Electronic books.
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Added Author |
Bruno, Giovanni.
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Capezzuto, Pio.
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Madan, A. (Arun)
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Other Form: |
Print version: Plasma deposition of amorphous silicon-based materials. Boston : Academic Press, ©1995 012137940X 9780121379407 (DLC) 95012433 (OCoLC)32311752 |
ISBN |
9780080539102 (electronic book) |
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0080539106 (electronic book) |
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1281054100 |
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9781281054104 |
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9780121379407 |
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012137940X |
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