Title Ultra Clean Processing of Semiconductor Surfaces XIII.

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Description	1 online resource (395 pages).
	text file
Series	Solid State Phenomena Vol. 255
	Diffusion and defect data. Pt. B, Solid state phenomena Vol. 255.
Bibliography	Includes bibliographical references at the end of each chapters and index.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Semiconductors -- Surfaces -- Congresses.
	Semiconductors -- Surfaces.
	Semiconductors -- Congresses.
	Semiconductors.
Genre/Form	Electronic books.
	Conference papers and proceedings.
	Conference papers and proceedings.
Added Author	Meuris, Marc.
	Heyns, Marc.
Other Form:	Print version: Mertens, Paul W. Ultra Clean Processing of Semiconductor Surfaces XIII. Zurich : Trans Tech Publications, ©2016 9783035710847
ISBN	9783035730845
	3035730849
	3035710848
	9783035710847