Title Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

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Description	1 online resource (xiv, 61 pages) : illustrations
Physical Medium	monochrome
Description	text file
Bibliography	Includes bibliographical references (pages 51-55).
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Microelectronics -- Materials.
	Microelectronics -- Materials.
	Microelectronics.
	Microelectromechanical systems -- Design and construction.
	Microelectromechanical systems -- Design and construction.
	Microelectromechanical systems.
Indexed Term	Andre fag (naturvidenskab og teknik) Andre fag
Genre/Form	Electronic books.
Added Author	National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
	National Research Council (U.S.). National Materials Advisory Board.
	National Research Council (U.S.). Commission on Engineering and Technical Systems.
Other Form:	Print version: Microelectromechanical systems. Washington, DC : National Academy Press, 1997 0309058856 (DLC) 97080865 (OCoLC)38297267
ISBN	0309059801 (Online version)
	9780309059800 (Online version)
	0585002509 (electronic book)
	9780585002507 (electronic book)
	0309058856 (print)
	9780309058858 (print)