| Description |
1 online resource : illustrations. |
| Physical Medium |
polychrome |
| Description |
text file |
| Series |
Key engineering materials,
1013-9826 ;
v. 503
|
|
Key engineering materials ; v. 503.
|
| Bibliography |
Includes bibliographical references and indexes. |
| Contents |
Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane. |
|
New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. |
|
A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone. |
|
Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution. |
|
Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization. |
| Summary |
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re. |
| Local Note |
eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America |
| Subject |
Nanotechnology -- Congresses.
|
|
Nanotechnology. |
|
Microtechnology -- Congresses.
|
|
Microtechnology. |
| Genre/Form |
Electronic books.
|
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Conference papers and proceedings.
|
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Conference papers and proceedings.
|
| Added Author |
Wang, Xiaohao.
|
| Other Form: |
Print version: Chinese Society of Micro/Nano Technology. Conference (13th : 2011 : Changzhou (Jiangsu Sheng, China)). Micro-nano technology XIII. Stafa-Zurich ; Enfield, NH : Trans Tech Publications, 2012 9783037853641 (DLC) 2012418417 (OCoLC)794588644 |
| ISBN |
9783038136897 (electronic book) |
|
3038136891 (electronic book) |
|
9783037853641 |
|
3037853646 |
|
