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Bestseller
Author
Ree, Moonhor.
Title
Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo.
Publication Info.
New York : Nova Science Publishers, [2010]
©2010
Online access
Online eBook. Access restricted to current Rider University students, faculty, and staff.
Instructions for reading/downloading this eBook
Item Status
Description
1 online resource (67 pages) : illustrations.
Physical Medium
polychrome
Description
text file
Series
Nanotechnology science and technology
Nanotechnology science and technology series.
Bibliography
Includes bibliographical references and index.
Local Note
eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject
Dielectric films.
Dielectric films.
Microelectronics -- Materials.
Microelectronics -- Materials.
Microelectronics.
Porous materials.
Porous materials.
Interconnects (Integrated circuit technology)
Interconnects (Integrated circuit technology)
Genre/Form
Electronic books.
Electronic books.
Added Author
Yoon, Jinhwan.
Heo, Kyuyoung.
Other Form:
Print version: Ree, Moonhor. Low-k nanoporous interdielectrics. New York : Nova Science Publishers, ©2010 9781616687496 (DLC) 2010016713 (OCoLC)612960158
ISBN
9781617283185 (electronic book)
1617283185 (electronic book)
9781616687496
1616687495