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Bestseller
BestsellerE-book
Author Ree, Moonhor.

Title Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo.

Publication Info. New York : Nova Science Publishers, [2010]
©2010

Item Status

Description 1 online resource (67 pages) : illustrations.
Physical Medium polychrome
Description text file
Series Nanotechnology science and technology
Nanotechnology science and technology series.
Bibliography Includes bibliographical references and index.
Local Note eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject Dielectric films.
Dielectric films.
Microelectronics -- Materials.
Microelectronics -- Materials.
Microelectronics.
Porous materials.
Porous materials.
Interconnects (Integrated circuit technology)
Interconnects (Integrated circuit technology)
Genre/Form Electronic books.
Electronic books.
Added Author Yoon, Jinhwan.
Heo, Kyuyoung.
Other Form: Print version: Ree, Moonhor. Low-k nanoporous interdielectrics. New York : Nova Science Publishers, ©2010 9781616687496 (DLC) 2010016713 (OCoLC)612960158
ISBN 9781617283185 (electronic book)
1617283185 (electronic book)
9781616687496
1616687495