| Description |
1 online resource (xviii, 279 pages) : illustrations. |
| Physical Medium |
polychrome |
| Description |
text file |
| Series |
EMIS Processing series ; no. 5
|
|
EMIS processing series ; no. 5.
|
| Bibliography |
Includes bibliographical references and index. |
| Contents |
1. Silicides -- an introduction / J.W. Mayer and S.S. Lau -- 2. Silicide formation / L.J. Chen -- 3. Titanium silicide technology / Z. Ma and L.H. Allen -- 4. Cobalt silicide technology / T. Kikkawa, K. Inoue and K. Imai -- 5. Nickel silicide technology / C. Lavoie, C. Detavernier and P. Besser -- 6. Light-emitting iron disilicide / L.J. Chou -- 7. Silicide contacts for Si/Ge devices / J.E. Burnette, M. Himmerlich and R.J. Nemanich -- 8. Silicide technology for SOI devices / L.P. Ren and K.N. Tu -- 9. Characterisation of metal silicides / Y.F. Hsieh, S.L. Cheng and L.J. Chen. |
| Access |
Use copy Restrictions unspecified MiAaHDL |
| Reproduction |
Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL |
| System Details |
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL |
| Processing Action |
digitized 2010 HathiTrust Digital Library committed to preserve MiAaHDL |
| Local Note |
eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America |
| Subject |
Silicides.
|
|
Silicides. |
|
Integrated circuits -- Materials.
|
|
Integrated circuits -- Materials. |
|
Integrated circuits. |
| Genre/Form |
Electronic books.
|
|
Electronic books.
|
| Added Author |
Chen, L. J.
|
|
Institution of Electrical Engineers.
|
| Other Form: |
Print version: Silicide technology for integrated circuits. London : Institution of Electrical Engineers, ©2004 0863413528 9780863413520 (DLC) 2006286573 (OCoLC)56760285 |
| ISBN |
9781849190664 (electronic book) |
|
1849190666 (electronic book) |
|
0863413528 (hardback) |
|
9780863413520 (hardback) |
|
