Title Borophosphosilicate glass thin films in electronics / editor, Vladislav Yu. Vasilyev (Semiconductor Devices and Microelectronics Department, Radio Engineering, Electronics, and Physics Faculty, Novosibirsk State Technical University, Novosibirsk, Russia).

Publication Info.	Hauppauge, New York, NY : Nova Science Publishers, Inc., [2013]
	©2013

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Description	1 online resource (263 pages).
Physical Medium	polychrome
Description	text file
Series	Materials science and technologies
	Electronics and telecommunications research
	Materials science and technologies series.
	Electronics and telecommunications research.
Note	Translation of: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki.
Bibliography	Includes bibliographical references and index.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Language	Text in English.
Subject	Electronic apparatus and appliances -- Materials.
	Electronic apparatus and appliances -- Materials.
	Electronic apparatus and appliances.
	Glass coatings.
	Glass coatings.
	Boron compounds.
	Boron compounds.
	Silicon compounds.
	Silicon compounds.
	Glass manufacture -- Chemistry.
	Glass manufacture -- Chemistry.
Genre/Form	Electronic books.
Added Author	Vasilʹev, V. I͡U. (Vladislav I͡Urʹevich), editor.
Added Title	Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki. English.
Other Form:	Print version: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki. English. Borophosphosilicate glass thin films in electronics. Hauppauge, New York : Nova Science Publishers, Inc., [2013] 9781624179594 (DLC) 2013002527 (OCoLC)840937559
ISBN	9781626180345 (electronic book)
	1626180342 (electronic book)
	9781624179594
	1624179592