Title Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Publication Info.

Online access
Online eBook. Access restricted to current Rider University students, faculty, and staff.
Instructions for reading/downloading this eBook

Item Status

Description	1 online resource (xii, 75 pages) : illustrations
Physical Medium	polychrome
Description	text file
Access	Use copy Restrictions unspecified MiAaHDL
Reproduction	Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
System Details	Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
Processing Action	digitized 2010 HathiTrust Digital Library committed to preserve MiAaHDL
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Plasma engineering.
	Plasma engineering.
	Microelectronics -- Materials -- Effect of radiation on.
	Microelectronics -- Materials -- Effect of radiation on.
	Microelectronics.
	Surfaces (Technology)
	Surfaces (Technology)
Genre/Form	Electronic books.
Other Form:	Print version: National Research Council (U.S.). Panel on Plasma Processing of Materials. Plasma processing of materials. Washington, D.C. : National Academy Press, 1991 0309045975 (DLC) 91066812 (OCoLC)24832731
ISBN	0585084637 (electronic book)
	9780585084633 (electronic book)
	0309045975 (paperback)
	9780309045971 (paperback)