Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportun

National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
Washington, D.C. : National Academy Press, 1992.

Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties

Ree, Moonhor.
New York : Nova Science Publishers, [2010]

Microelectromechanical systems : advanced materials and fabrication methods

Washington, DC : National Academy Press, 1997.

Sputtering materials for VLSI and thin film devices

Sarkar, Jaydeep (Materials scientist), author.
Norwich, N.Y. : William Andrew, 2011.