| Edition |
1st ed. |
| Description |
1 online resource (xxxii, 636 pages) : illustrations. |
| Physical Medium |
polychrome |
| Description |
text file |
| Series |
Micro & nano technologies
|
|
Micro & nano technologies.
|
| Bibliography |
Includes bibliographical references and index. |
| Contents |
Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index. |
| Summary |
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo. |
| Local Note |
eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America |
| Subject |
Microelectromechanical systems.
|
|
Microelectromechanical systems. |
|
Microelectromechanical systems -- Materials.
|
|
Microelectromechanical systems -- Materials. |
|
Silicon -- Electric properties.
|
|
Silicon -- Electric properties. |
| Genre/Form |
Electronic books.
|
| Added Author |
Lindroos, Veikko.
|
| Other Form: |
Print version: Handbook of silicon based MEMS materials and technologies. 1st ed. Amsterdam ; Boston : William Andrew/Elsevier, 2010 9780815515944 (OCoLC)428777214 |
| ISBN |
9780080947723 (electronic book) |
|
0080947727 (electronic book) |
|
9780815515944 (hardback) |
|
0815515944 (hardback) |
| Standard No. |
9786612541148 |
|
