Title Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / Edited by Changhui Liu.

Publication Info.	Zurich, Switzerland : Trans Tech Publications, [2014]
	©2014

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Online eBook. Access restricted to current Rider University students, faculty, and staff.
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Description	1 online resource (117 pages) : illustrations (some color), graphs, photographs.
Physical Medium	polychrome
Description	text file
Series	Advanced Materials Research, 1662-8985 ; vol. 901
	Advanced materials research ; v. 901.
Bibliography	Includes bibliographical references and indexes.
Summary	Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Microelectromechanical systems -- Congresses.
	Microelectromechanical systems.
	Nanotechnology -- Congresses.
	Nanotechnology.
Genre/Form	Electronic books.
	Conference papers and proceedings.
	Conference papers and proceedings.
Added Author	Liu, Changhui, editor.
Other Form:	Print version: Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. Zurich, Switzerland : TTP, ©2014 120 pages Advanced materials research ; Volume 901 1662-8985 9783038350477
ISBN	9783038264286 (electronic book)
	3038264288 (electronic book)
	9783038350477