Title Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.

Publication Info.	Boston : Artech House, [2004]
	©2004

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Online eBook. Access restricted to current Rider University students, faculty, and staff.
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Item Status

Edition	2nd ed.
Description	1 online resource (xx, 283 pages) : illustrations.
Physical Medium	polychrome
Description	text file
Series	Artech House microelectromechanical systems (MEMS) series
	Microelectromechanical systems series.
Bibliography	Includes bibliographical references and index.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Microelectromechanical systems.
	Microelectromechanical systems.
Genre/Form	Electronic books.
Added Author	Williams, Kirt.
Other Form:	Print version: Maluf, Nadim. Introduction to microelectromechanical systems engineering. 2nd ed. Boston : Artech House, ©2004 1580535909 (DLC) 2004050669 (OCoLC)55286400
ISBN	1580535917 (electronic book)
	9781580535915 (electronic book)
	1580535909 (alkaline paper)
	9781580535908 (alkaline paper)