Title MEMS mechanical sensors / Stephen Beeby [and others].

Publication Info.	Boston : Artech House, [2004]
	©2004

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Online eBook. Access restricted to current Rider University students, faculty, and staff.
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Item Status

Description	1 online resource (x, 269 pages) : illustrations.
Physical Medium	polychrome
Description	text file
Series	Artech House microelectromechanical systems (MEMS) series
	Microelectromechanical systems series.
Bibliography	Includes bibliographical references and index.
Summary	Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Microelectromechanical systems.
	Microelectromechanical systems.
	Detectors.
	Detectors.
Genre/Form	Electronic books.
Added Author	Beeby, Stephen.
Other Form:	Print version: MEMS mechanical sensors. Boston : Artech House, ©2004 1580535364 (DLC) 2004046158 (OCoLC)54692250
ISBN	1580538738 (electronic book)
	9781580538732 (electronic book)
	1580535364 (alkaline paper)
	9781580535366 (alkaline paper)