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Author Maluf, Nadim.

Title Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.

Imprint Boston : Artech House, ©2004.

Item Status

Edition 2nd ed.
Description 1 online resource (xx, 283 pages) : illustrations.
Series Artech House microelectromechanical systems (MEMS) series
Microelectromechanical systems series.
Bibliography Includes bibliographical references and index.
Local Note eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject Microelectromechanical systems.
Genre/Form Electronic books.
Added Author Williams, Kirt.
Other Form: Print version: Maluf, Nadim. Introduction to microelectromechanical systems engineering. 2nd ed. Boston : Artech House, ©2004 1580535909 (DLC) 2004050669 (OCoLC)55286400
ISBN 1580535917 (electronic bk.)
9781580535915 (electronic bk.)
1580535909 (alk. paper)
9781580535908 (alk. paper)