Title Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.

Imprint

Online access
Online eBook. Access restricted to current Rider University students, faculty, and staff.
Instructions for reading/downloading this eBook

Item Status

Edition	2nd ed.
Description	1 online resource (xx, 283 pages) : illustrations.
Series	Artech House microelectromechanical systems (MEMS) series
	Microelectromechanical systems series.
Bibliography	Includes bibliographical references and index.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Microelectromechanical systems.
Genre/Form	Electronic books.
Added Author	Williams, Kirt.
Other Form:	Print version: Maluf, Nadim. Introduction to microelectromechanical systems engineering. 2nd ed. Boston : Artech House, ©2004 1580535909 (DLC) 2004050669 (OCoLC)55286400
ISBN	1580535917 (electronic bk.)
	9781580535915 (electronic bk.)
	1580535909 (alk. paper)
	9781580535908 (alk. paper)