Title Ion Implantation and Activation - Volume 1.

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Description	1 online resource (464 pages).
	text file
Series	Ion Implantation and Activation
	Ion Implantation and Activation.
Contents	Cover; Title; EUL; Contents; Foreword; Preface; Acknowledgement; Chapter 01; Chapter 02; Chapter 03; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Chapter 09; Chapter 10; Chapter 11; Index.
Summary	Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory, Monte Carlo simulations, Edgeworth Polynomials and much more. This book provides advanced engineering and physics students and researchers with complete and coherent coverage of modern semiconductor process modeling.
Local Note	eBooks on EBSCOhost EBSCO eBook Subscription Academic Collection - North America
Subject	Ion implantation -- Computer simulation.
	Ion implantation -- Computer simulation.
	Ion implantation.
	Semiconductors -- Deisign and construction -- Computer simulation.
	Semiconductors.
	Computer simulation.
Genre/Form	Electronic books.
Other Form:	Print version: Suzuki, Kunihiro. Ion Implantation and Activation - Volume 1. Sharjah : Bentham Science Publishers, ©2013 9781608057825
ISBN	9781608057818 electronic book
	160805781X electronic book