LEADER 00000cam a2200733Ki 4500 
001    ocn854583694 
003    OCoLC 
005    20160527040655.1 
006    m     o  d         
007    cr cnu---unuuu 
008    130729s2013    nyu     ob    001 0 eng d 
019    858126055 
020    9781626180345|q(electronic book) 
020    1626180342|q(electronic book) 
020    |z9781624179594 
020    |z1624179592 
035    (OCoLC)854583694|z(OCoLC)858126055 
040    N$T|beng|erda|epn|cN$T|dE7B|dYDXCP|dOCLCO|dOCLCF|dMEU
       |dEBLCP|dOCLCQ 
041 1  eng|hrus 
049    RIDW 
050  4 TK7871.15.S55|bT6613 2013eb 
072  7 TEC|x008010|2bisacsh 
082 04 621.3815/31|223 
090    TK7871.15.S55|bT6613 2013eb 
130 0  Tonkie sloi borofosforosilikatnogo stekla v tekhnologii 
       kremnievoĭ mikroėlektroniki.|lEnglish. 
245 10 Borophosphosilicate glass thin films in electronics /
       |ceditor, Vladislav Yu. Vasilyev (Semiconductor Devices 
       and Microelectronics Department, Radio Engineering, 
       Electronics, and Physics Faculty, Novosibirsk State 
       Technical University, Novosibirsk, Russia). 
264  1 Hauppauge, New York, NY :|bNova Science Publishers, Inc.,
       |c[2013] 
264  4 |c©2013 
300    1 online resource (263 pages). 
336    text|btxt|2rdacontent 
337    computer|bc|2rdamedia 
338    online resource|bcr|2rdacarrier 
340    |gpolychrome|2rdacc 
347    text file|2rdaft 
490 1  Materials science and technologies 
490 1  Electronics and telecommunications research 
500    Translation of: Tonkie sloi borofosforosilikatnogo stekla 
       v tekhnologii kremnievoĭ mikroėlektroniki. 
504    Includes bibliographical references and index. 
546    Text in English. 
588 0  Print version record. 
590    eBooks on EBSCOhost|bEBSCO eBook Subscription Academic 
       Collection - North America 
650  0 Electronic apparatus and appliances|0https://id.loc.gov/
       authorities/subjects/sh85042254|xMaterials.|0https://
       id.loc.gov/authorities/subjects/sh2002006405 
650  0 Glass coatings.|0https://id.loc.gov/authorities/subjects/
       sh85055129 
650  0 Boron compounds.|0https://id.loc.gov/authorities/subjects/
       sh89002772 
650  0 Silicon compounds.|0https://id.loc.gov/authorities/
       subjects/sh85122521 
650  0 Glass manufacture|xChemistry.|0https://id.loc.gov/
       authorities/subjects/sh85055158 
650  7 Electronic apparatus and appliances|xMaterials.|2fast
       |0https://id.worldcat.org/fast/906813 
650  7 Electronic apparatus and appliances.|2fast|0https://
       id.worldcat.org/fast/906772 
650  7 Glass coatings.|2fast|0https://id.worldcat.org/fast/943107
650  7 Boron compounds.|2fast|0https://id.worldcat.org/fast/
       836715 
650  7 Silicon compounds.|2fast|0https://id.worldcat.org/fast/
       1118665 
650  7 Glass manufacture|xChemistry.|2fast|0https://
       id.worldcat.org/fast/943193 
655  4 Electronic books. 
700 1  Vasilʹev, V. I͡U.|q(Vladislav I͡Urʹevich),|0https://
       id.loc.gov/authorities/names/n2013020020|eeditor. 
776 08 |iPrint version:|aTonkie sloi borofosforosilikatnogo 
       stekla v tekhnologii kremnievoĭ mikroėlektroniki. English.
       |tBorophosphosilicate glass thin films in electronics.
       |dHauppauge, New York : Nova Science Publishers, Inc., 
       [2013]|z9781624179594|w(DLC)  2013002527|w(OCoLC)840937559
830  0 Materials science and technologies series.|0https://
       id.loc.gov/authorities/names/no2009129021 
830  0 Electronics and telecommunications research.|0https://
       id.loc.gov/authorities/names/no2013129148 
856 40 |uhttps://rider.idm.oclc.org/login?url=http://
       search.ebscohost.com/login.aspx?direct=true&scope=site&
       db=nlebk&AN=619652|zOnline eBook. Access restricted to 
       current Rider University students, faculty, and staff. 
856 42 |3Instructions for reading/downloading this eBook|uhttp://
       guides.rider.edu/ebooks/ebsco 
901    MARCIVE 20231220 
948    |d20160607|cEBSCO|tebscoebooksacademic|lridw 
994    92|bRID