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001    ocm56123929  
003    OCoLC 
005    20160527041530.6 
006    m     o  d         
007    cr cnu|||unuuu 
008    040810s2004    maua    ob    001 0 eng d 
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020    1580535917|q(electronic book) 
020    9781580535915|q(electronic book) 
020    1580535909|q(alkaline paper) 
020    9781580535908|q(alkaline paper) 
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050  4 TK7875|b.M35 2004eb 
072  7 TEC|x008070|2bisacsh 
072  7 TEC|x008060|2bisacsh 
082 04 621.381|222 
084    TN4|2clc 
090    TK7875|b.M35 2004eb 
100 1  Maluf, Nadim.|0https://id.loc.gov/authorities/names/
       n99255109 
245 10 Introduction to microelectromechanical systems engineering
       /|cNadim Maluf, Kirt Williams. 
250    2nd ed. 
264  1 Boston :|bArtech House,|c[2004] 
264  4 |c©2004 
300    1 online resource (xx, 283 pages) :|billustrations. 
336    text|btxt|2rdacontent 
337    computer|bc|2rdamedia 
338    online resource|bcr|2rdacarrier 
340    |gpolychrome|2rdacc 
347    text file|2rdaft 
490 1  Artech House microelectromechanical systems (MEMS) series 
504    Includes bibliographical references and index. 
588 0  Print version record. 
590    eBooks on EBSCOhost|bEBSCO eBook Subscription Academic 
       Collection - North America 
650  0 Microelectromechanical systems.|0https://id.loc.gov/
       authorities/subjects/sh97007351 
650  7 Microelectromechanical systems.|2fast|0https://
       id.worldcat.org/fast/1019745 
655  4 Electronic books. 
700 1  Williams, Kirt.|0https://id.loc.gov/authorities/names/
       n2004007341 
776 08 |iPrint version:|aMaluf, Nadim.|tIntroduction to 
       microelectromechanical systems engineering.|b2nd ed.
       |dBoston : Artech House, ©2004|z1580535909|w(DLC)  
       2004050669|w(OCoLC)55286400 
830  0 Microelectromechanical systems series.|0https://id.loc.gov
       /authorities/names/n99043021 
856 40 |uhttps://rider.idm.oclc.org/login?url=http://
       search.ebscohost.com/login.aspx?direct=true&scope=site&
       db=nlebk&AN=113804|zOnline eBook. Access restricted to 
       current Rider University students, faculty, and staff. 
856 42 |3Instructions for reading/downloading this eBook|uhttp://
       guides.rider.edu/ebooks/ebsco 
901    MARCIVE 20231220 
948    |d20160615|cEBSCO|tebscoebooksacademic|lridw 
994    92|bRID